1. Application:high quality optical film glass, pc
and wafer?etc.,
2. Feature:fast pumping rate, good film uniformity,
automatic control and protection
3. SPEC:
Main power:3phase 220/380v.50/60 hz approx 120-250 a
Sus chamber:dia.1100/1400mm x h.1200/1600mm(or
customer spec)
System control:plc automatic control and
protection
Vacuum pumps:mechanic pump/4500/8500 l/min
roos pump/1600/3400 m3/hr
diffusion pump/23000 l/sec/26inch
customer spec
Thickness monitor:optical or crystal
E-beam:5-10 kw on 4x30 cc crucibles
Necessary space.weight (approx):
wxdwh: 2800 mmx 1500 mm x 2400 mm , 3000-5000 kg
4. Optional:plasma. Ion source cleaning & assist
coating
Gas mass flow controller
Country of Origin:Taiwan
Sales Method:Manufacture
Payment Terms:T/T,L/C