1. Application：high quality optical film glass, pc
and wafer?etc.,
2. Feature：fast pumping rate, good film uniformity,
automatic control and protection
3. SPEC：
Main power：3phase 220/380v.50/60 hz approx 120-250 a
Sus chamber：dia.1100/1400mm x h.1200/1600mm(or
customer spec)
System control：plc automatic control and
protection
Vacuum pumps：mechanic pump/4500/8500 l/min
roos pump/1600/3400 m3/hr
diffusion pump/23000 l/sec/26inch
customer spec
Thickness monitor：optical or crystal
E-beam：5-10 kw on 4x30 cc crucibles
Necessary space.weight (approx)：
wxdwh: 2800 mmx 1500 mm x 2400 mm , 3000-5000 kg
4. Optional：plasma. Ion source cleaning & assist
coating
Gas mass flow controller
Country of Origin：Taiwan
Sales Method：Manufacture
Payment Terms：T/T，L/C
