.Application：high quality oporical film as glass,
pc and wafer?..etc.,
.Feature：automatic conating process & pressure
control, fast pumpong rate, good film uniformity,automatic
control and protection by plc and computer
.SPEC：
1. Main power：3phase 220/380v.50/60 hz approx
120-250a
2. Sus chamber：dia.1100/1400mm x h.1200/1600mm;(or
customer spec)
3. System control：computer plc automatic control and
protection
4. Vacuum pumps：mechanic pump/4500/8500 l/min
roos pump/1600/3400 m3/hr
diffusion pump/23000 l/sec/26inch
customer spec
.Thickness controller：optical or crystal
.E-beam：5-10 kw on 4x30 cc crucibles
.Necessary space.weight(approx)：
w x d x h:2800mm x 1500mm x
2400mm,3000-5000kg
.Optional：plasma.ion source cleaning & Assist
coating
.Gas mass flow controller
Country of Origin：Taiwan
Sales Method：Export ,Manufacture
Payment Terms：T/T，L/C
