.Application：high quality oporical film as glass, pc and wafer?..etc., .Feature：automatic conating process & pressure control, fast pumpong rate, good film uniformity,automatic control and protection by plc and computer .SPEC： 1. Main power：3phase 220/380v.50/60 hz approx 120-250a 2. Sus chamber：dia.1100/1400mm x h.1200/1600mm;(or customer spec) 3. System control：computer plc automatic control and protection 4. Vacuum pumps：mechanic pump/4500/8500 l/min roos pump/1600/3400 m3/hr diffusion pump/23000 l/sec/26inch customer spec .Thickness controller：optical or crystal .E-beam：5-10 kw on 4x30 cc crucibles .Necessary space.weight(approx)： w x d x h:2800mm x 1500mm x 2400mm,3000-5000kg .Optional：plasma.ion source cleaning & Assist coating .Gas mass flow controller Country of Origin：Taiwan Sales Method：Export ,Manufacture Payment Terms：T/T，L/C
.Application：high quality oporical film as glass, pc and wafer?..etc., .Feature：automatic conating process & pressure control, fast pumpong rate, good film uniformity,automatic control and protection by plc and computer .SPEC： 1. Main power：3phase 220/380v.50/60 hz approx 120-250a 2. Sus chamber：dia.1100/1400mm x h.1200/1600mm;(or customer spec) 3. System control：computer plc automatic control and protection 4. Vacuum pumps：mechanic pump/4500/8500 l/min roos pump/1600/3400 m3/hr diffusion pump/23000 l/sec/26inch customer spec .Thickness controller：optical or crystal .E-beam：5-10 kw on 4x30 cc crucibles .Necessary space.weight(approx)： w x d x h:2800mm x 1500mm x 2400mm,3000-5000kg .Optional：plasma.ion source cleaning & Assist coating .Gas mass flow controller Country of Origin：Taiwan Sales Method：Export ,Manufacture Payment Terms：T/T，L/C
